The University of Iowa


Optical Science and
Technology Center

UIMF SEMINAR: Nanofabrication and Nano-characterization Tool: Advanced FIB-SEM

104 Iowa Advanced Technology Laboratories (IATL)

Nanofabrication and Nano-characterization Tool: Advanced FIB-SEM
Soeren Eyhusen, PhD
Carl Zeiss Microscopy, LLC

Wednesday, February 8, 2017 1:00 p.m.
Iowa Advanced Technology Center (IATL)
Conference Room, 104

Soeren Eyhusen has a background in materials science and ion beam physics. Aft er receiving a PhD from Goettingen University, Germany, he joined Carl Zeiss NTS and started working as a developer for transmission and scanning electron microscopes, focusing on electron optics and system integration. In 2012, he moved to the United States where he has been working as a product marketing and business development manager for electron and ion beam microscopes for Carl Zeiss in Thornwood, New York.

Focused Ion beam (FIB) technology has become indispensable in fundamental scientific studies and technological applications. One major driving force behind its popularity is that it offers both high-resolution imaging
and flexible micromachining and nanofabrication in a single platform. Based on the proven and highly flexible GEMINI electron beam column, ZEISS Crossbeam 540 combines a high performance field emission SEM with
a state of the art gallium ion beam column. Th is unique instrument enables new research in multidisciplinary areas of research, including life sciences, physical sciences, and materials engineering. In this presentation we
will give an overview of the technology behind ZEISS Crossbeam as well as report on some of the exciting correlative applications that are now possible with a gallium ion beam, including nanofabrication and the acquisition
of 3D datasets with voxel resolutions of down to 3nm.

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Individuals with disabilities are encouraged to attend all University of Iowa sponsored events. If you are a person with a disability who requires an accommodation in order to attend this program, please contact the Optical Science & Technology Center in advance at 353-0974 or email