The University of Iowa


Optical Science and
Technology Center


SP17 Hands-on Course in Nanotechnology

Course Title: Fundamentals of Micro and Nanofabrication 

Course code: 029:135 (OSTC 3750/PHYS: 3750), 3 s. h.

(Lecture Tue. &Thu., 12:30-1:20 pm, Labs every two weeks, starting Jan. 23)

Learn how to make devices or structures that are about 1000 times smaller than the size of human hair.

• Learn how devices such as Iphones, computers processors, various electronic gadgets, sensors, bio-medical devices, DNA chips are fabricated using stateof- the-art tools and techniques.

• Go on a field trip to the Argonne National Lab to see some real-world nanotechnology applications and nano-scale manufacturing.

Enrollment in this course only requires that you have taken an undergraduate lab course in Chemistry or Biology or Physics or Engineering. Limited enrollment.

What is the course about?

This undergraduate/graduate multidisciplinary course offered by the Department of Physics and Astronomy and the Optical Science and Technology Center is available in the Spring of 2017. Students from various disciplines were previously enrolled in this course. The topics of the course deal with the fundamentals of micro- and nano-fabrication techniques involved in the manufacture of a wide range miniature devices with applications in areas as diverse as computing, communications, energy, medicine, genomics and bio-medical. The course involves a series of laboratory experiments where students acquire hands-on experience on state-of-the-art tools in the new cleanroom in the University of Iowa Microfabrication Facility (UIMF), in the Optical Science and Technology Center (OSTC).

Course description:

An introduction to the fundamentals of micro- and nano-fabrication processes. The physical principles of photo and electron beam lithography, alternative nano-lithography techniques, thin film deposition, molecular beam epitaxy, atomic layer deposition, self-assembly. Metrology methods. Physical and chemical processes of wet and plasma etching. Cleanroom science, operations and safety protocols. Sequential micro- and nano-fabrication processes involved in the manufacture of semiconductor, photonic and nano-scale devices. Imaging and characterization of micro- and nano-structures. Scientific and technological applications of emerging micro- and nano-devices and systems.

Key Course Modules and hands-on Labs: Lithography, NanoImprint, Atomic Layer DepositionElectron Beam metal deposition, Reactive Ion Etching, Electron Microscopy, Electron Beam Nanolithography, 3D Optical Profiler and Ellipsometry.

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