The University of Iowa


IMPORTANT: The Optical Science and Technology Center and Microfabrication Facility are being retired after fall 2018 and their services reconfigured under the new Iowa Center for Research, Exploration, and Advanced Technology in Engineering and Sciences (Iowa-CREATES) and Materials Analysis, Testing, and Fabrication (MATFab) in the Iowa Advanced Technology Laboratories (IATL) in spring 2019. As a result, the OSTC/UIMF site will eventually be taken down. Until then, please visit the Iowa-CREATES Website at https://iowacreates.research.uiowa.edu/, or read more about the new center at https://research.uiowa.edu/impact/news/ui-gears-new-improved-research-center-engineering-and-physical-sciences.

OSTC

Optical Science and
Technology Center

RIE-ICP

Tuesday, July 23, 2013

Another new tool, an Oxford Instrument, RIE-ICP Plasma Pro S100 (Cobra) has been ordered, which will be installed in the cleanroom 174. This tool is capable of high aspect ratio submicron etching using the cryogenic and Bosch processes. Various etch chemistries are possible which include Cl2, BCl3 and SF6 gases.