Optical Science and
Technology Center

Facility Info Sheets

The University of  Iowa Microfabrication Facility (UIMF) is an interdisciplinary central research facility and service center that provides access to state-­of-the-art equipment in the areas of micro and nanofabrication, metrology, device characterization and offers expertise and advanced training courses in the same related areas. It is an open-research facility serving the academic, industrial and governmental researchers across campus and beyond. The facility offers a common platform for the convergence of multiple scientific and engineering disciplines and facilitates collaborative research with strategic partners and information exchange.

Our goals are:

  • To provide shared experimental capabilities with advanced equipment, skilled personnel and effective training.
  • To promote and enable high quality research using a suite of micro- and nano-fabrication tools.
  • To advance fundamental and technical knowledge in the area of micro-­ and and nano-fabrication technologies.
  • To promote multidisciplinary research and training through the usage of micro-­ and nano-­fabrication tools.
  • To train and support graduate and undergraduate research in the applications of micro-­ and nano-­fabrication.
  • To generate and disseminate knowledge to the wider research

 About the Facility:

The University of Iowa Microfabrication Facility offers state-­‐of-­‐the-­‐art equipment and capabilities in the area of micro and nanofabrication technologies including:

  • ISO 5 Cleanroom
  • Nanoimprint
  • Reactive Ion Etching
  • Deep Reactive Ion Etching: Bosch and Cryogenic processes
  • E-­‐Beam Thin Film Deposition
  • Sputter Thin Film Deposition
  • Atomic Layer Deposition
  • Photolithography
  • Thin Film Metrology
  • 3D Optical Surface Profiling
  • Rapid Thermal Processing
  • Spectroscopic Ellipsometry
  • Wafer Bonding
  • Wire Bonding

Download UIMF Facility Sheet