The University of Iowa


Optical Science and
Technology Center

Facility Info Sheets

The University of  Iowa Microfabrication Facility (UIMF) is an interdisciplinary central research facility and service center that provides access to state-­of-the-art equipment in the areas of micro and nanofabrication, metrology, device characterization and offers expertise and advanced training courses in the same related areas. It is an open-research facility serving the academic, industrial and governmental researchers across campus and beyond. The facility offers a common platform for the convergence of multiple scientific and engineering disciplines and facilitates collaborative research with strategic partners and information exchange.

Our goals are:

  • To provide shared experimental capabilities with advanced equipment, skilled personnel and effective training.
  • To promote and enable high quality research using a suite of micro- and nano-fabrication tools.
  • To advance fundamental and technical knowledge in the area of micro-­ and and nano-fabrication technologies.
  • To promote multidisciplinary research and training through the usage of micro-­ and nano-­fabrication tools.
  • To train and support graduate and undergraduate research in the applications of micro-­ and nano-­fabrication.
  • To generate and disseminate knowledge to the wider research

 About the Facility:

The University of Iowa Microfabrication Facility offers state-­‐of-­‐the-­‐art equipment and capabilities in the area of micro and nanofabrication technologies including:

  • ISO 5 Cleanroom
  • Nanoimprint
  • Reactive Ion Etching
  • Deep Reactive Ion Etching: Bosch and Cryogenic processes
  • E-­‐Beam Thin Film Deposition
  • Sputter Thin Film Deposition
  • Atomic Layer Deposition
  • Photolithography
  • Thin Film Metrology
  • 3D Optical Surface Profiling
  • Rapid Thermal Processing
  • Spectroscopic Ellipsometry
  • Wafer Bonding
  • Wire Bonding

Download UIMF Facility Sheet