The University of Iowa


Optical Science and
Technology Center


UIMF Equipment Spec Sheets are now available on website.

Information may be found at:


UIMF Installs Raith Voyager Electron-Beam Nanolithography System

The state-of-the-art and high-performance instrument, Raith Voyager Electron-Beam Nanolithography System has now been installed in the UIMF ISO 5 cleanroom (IATL 172). The tool with a 50kV electron-beam column, less than 2.5 nm beam size and 50 MHz pattern generator can pattern features down to 10 nm or smaller over large areas in the millimeter and centimeter range and can provide a pattern placement accuracy of sub-10 nm. The tool is now available for device fabrication and research in Nanoscale Science and Engineering.